7 Results
In order to demostrate the resulting IMPETUS II software
yield-dose curves for the Silicon-Germanium and
Aluminum-Gallium-Arsenic systems are given in this section.
IMPETUS II consists as one central code. Different material
systems may be attached to this by invoking the corresponding
database. Thus the results from IMPETUS II given in this
paper all result from a single program. Full datails on the
material sustem database is given in the IMPETUS II
User Manual [7]. The data that describes the
material systems is the same as the data used in [5].
In figure 10 the yield of Germanium resulting from a 100 angstrom
block of Germanium ad a depth of 200 angstroms is given
for angles of 30, 45, 60 and 75 degrees to the normal and at 2keV. Figure
11 gives yield-dose curve for the same experiment but
at 5keV. Figures 12 and 13 give the yield-dose curves that
result from a 100 angstrom block of 50:50 Aluminium and
Arsenic in a matrix of 50:50 Gallium and Arsenic at 200 angstroms
deep and at 2.5keV and 5keV. In each case the bombardment
angles are 0, 10, 20, 30, 40, 50, 60 degrees to the normal.
IMPETUS II generates more real-time graphical output and
has a more complicated solution algorithm,
as we will see in the companion paper [6]. However,
on the test problem of a 100 angstrom block of material with
sharp intefaced placed at 200 angstroms depth IMPETUS II
is about three or four times faster on the material systems
considered in this paper.
Figue 10
Figue 11
Figue 12
Figue 13